Items where Subject is "Q Science > QC Physics > QC717.6 Plasma physics. Ionised gases"

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• Library of Congress Subject Areas (1)
  • Q Science (1)
    • QC Physics (1)
      • QC717.6 Plasma physics. Ionised gases (1)

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• Al-Kuzee, J., Matsuura, T., Goodyear, A., Nolle, L., Hopgood, A. A., Picton, P. and Braithwaite, N. S. J. (2004) Optimization of plasma etch processes using evolutionary search methods with in-situ diagnostics. Plasma Sources Science and Technology. 13(4), pp. 612-622. 1361-6595.

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