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Jump to: 2004
Number of items at this level: 1.
2004
- Al-Kuzee, J., Matsuura, T., Goodyear, A., Nolle, L., Hopgood, A. A., Picton, P. and Braithwaite, N. S. J. (2004) Optimization of plasma etch processes using evolutionary search methods with in-situ diagnostics. Plasma Sources Science and Technology. 13(4), pp. 612-622. 1361-6595.