Northampton Electronic Collection of Theses and Research

Items where Subject is "QC717.6 Plasma physics. Ionised gases"

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Jump to: 2004
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2004

  1. Al-Kuzee, J., Matsuura, T., Goodyear, A., Nolle, L., Hopgood, A. A., Picton, P. and Braithwaite, N. S. J. (2004) Optimization of plasma etch processes using evolutionary search methods with in-situ diagnostics. Plasma Sources Science and Technology. 13(4), pp. 612-622. 1361-6595.
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