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Number of items:
1
.
Article
Al-Kuzee, J.
,
Matsuura, T.
,
Goodyear, A.
,
Nolle, L.
,
Hopgood, A. A.
,
Picton, P.
and
Braithwaite, N. S. J.
(2004)
Optimization of plasma etch processes using evolutionary search methods with in-situ diagnostics.
Plasma Sources Science and Technology.
13
(4), pp. 612-622. 1361-6595.
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